Currently, most CPU are engraved at 45 nm. In a couple of months, the transition to 32-nm technology should start. Then, in the following 2 years, engineers should work out specification for producing 22-nm engraved CPU. Beyond this limit, it seems that there are more physoical and technology problems than solutions.
Toshiba announced a major breakthrough for manufacturing transistor engraved at 16 nm. They obtained such result by using Germanium instead of Silicon. This is an example of the numerous development issues that companies in the field will have to overcome in order to deliver 16, 32 or 64 cores-based CPUs, especially if they want to keep Moore's law effective.
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